Ultra High Purity Sintered SiC – SemiLAST
Ultra High Purity Sintered Silicon Carbide
SemiLAST®
JJISCO’s high purity, high density, solid silicon carbide product offering was developed for the rigorous demands of wafer processing. We provide custom designs to meet your specific size and shape requirements. These silicon carbide components will operate in the clean environments required in semiconductor manufacturing.
SemiLAST ultra high purity SiC components custom designed for wafer processing.
Some material characteristics include:
- Purity greater than 99.995%, offering reduced particulate trace elements regeneration
- Key electrical properties developed for semiconductor processing
- High thermal shock resistance for improved component life cycle and cost of ownership
- Chemical compatibility resistant to common cleaning agents of HF and HNO3 concentrations
- Superior mechanical properties to provide excellent wear and abrasion resistance
- High stiffness/low mass which allows for lightweight, thin components
Below are typical property values of SemiLAST components:
To discuss material selection with one of our technical specialists or to request a material data sheet with complete specifications, contact us today!
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